honeywell zephyr? digital airflow sensors: haf series ? high accuracy 20 sl p m or 200 sl p m 22 mm od tapered male fitting g 3/8 threaded female fitting manifold mount description honeywell zephyr? haf series sensors provide a digital interface for reading airflow over specified full - scale flow and compensated temperature ranges. the thermally isolated heater and temperature sensing elements help these sensors provide a fas t response to air or gas flow. zephyr sensors are designed to measure mass flow of air and other non - corrosive gases . standard flow ranges are 20 sl p m or 200 sl p m , with custom flow ranges available . the sensors are fully calibrated and temperature comp ensated with an onboard application specific integrated circuit (asic). the h af series >20 slpm is c ompensated over the calibrated t emperature range of 0 c to 50 c [32 f to 122 f] . the state - of - the - art asic - based compensation provides digital (i 2 c) out puts with a response time of 1 ms. these sensors operate on the heat transfer principle to measure mass airflow. they consist of a m icrobridge m icroelectronic and microelectromechanical system (mems ) with temperature - sensitive resistors deposited with t hin films of platinum and silicon nitride. the mems sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow. zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. the combination of rugged housings with a stable substrate makes the se products extremely robust. they are designed and manufactured according to iso 9001 sta ndards. featu res and benefits ( ? =competitive differentiator) ? total error band (teb) is 0.5 %fs or 4% reading, whichever is greater , allowing for precise airflow measurement often ideal for demanding applications with high accuracy requirements for pre cise airflow measurement ? high accuracy (3.5% reading) often ideal for demanding applications with high accuracy requirements ? fast response time allows a customer's application to respond quickly to airflow change, important in critical medical (e.g., ane sthesia) and industrial (e.g., fume hood) applications ? wide range of airflows: zephyr measures mass flow with standard flow ranges of 20 sl p m and 200 sl p m , or custom flow ranges, inc reasing the options for integrating the sensor into the application ? full calibration and temperature compensation typically allow customer to remove additional components associated with signal conditioning from the pcb, reducing pcb size as well as costs often associated with those components (e.g., acquisition, inventory, as sembly) ? high sensitivity at very low flows provides for faster response time at the onset or cessation of flow ? linear output provides more intuitive sensor signal than the raw output of basic airflow sensors, which can help reduce production costs, desig n, and implementation time ? customizable flow ranges and configurable package styles to meet specific end - user needs ? high stability reduces errors due to thermal effects and null shift to provide accurate readings over time, often eliminating need for sy stem calibration after pcb mount and periodically over time ? low pressure drop typically improves patient comfort in medical applications, and reduces noise and system wear on other components such as motors and pumps ? high 12 - bit resolution increases abil ity to sense small airflow changes, allowing customers to more precisely control their application ? flexible regulated powers from 3 vdc to 10 vdc g ive the designer the flexibility to choose what supply voltage works best in the system ? asic - based i 2 c digit al output compatibility eases integration to microprocessors or microcontrollers, reducing pcb complexity and component count ? rohs - compliant materials meet directive 2002/95/ec ? choice of port styles ( m anifold m ount, 22 mm od t apered male fitting, and g 3/8 female threaded fitting) provide flexibility to choose the pneumatic connection that is best for the customers application ? optimized calibration for many gases, including dry air, helium (he), argon (ar), n itrogen (n 2 ), nitrous oxide (n 2 o), and carbon di oxide (co 2 ) eliminates the need to implement gas correction factors
honeywell zephyr? digital airflow sensors haf series ? 2 sensing.honeywell.com potential applicatio ns medical ? anesthesia delivery machines ? ventilators ? ven tricular assist devices (heart pumps) ? patient monitoring systems (respiratory monitoring) ? spirometers ? la paroscopy industrial ? analytic i nstrument ation (spectrometry, chromatography) ? air - to - fuel ratio ? fuel cells ? fume hoods ? gas leak detection ? gas meters table 1: a bsolute maximum ratings 1 characteristic parameter caution improper use do not use these produ cts to sense liquid flow. failure to comply with these instructions may result in product damage. caution product damage do not disassemble these products. failure to comply with these instructions may result in product damage. supply voltage - 0.3 vdc to 11.0 vdc voltage on digital i/o output pins - 0.3 v dc to 3.0 vdc 2 storage temperature range - 40 c to 100 c [ - 40 f to 212f] maximum flow change 10,000 slpm/s maximum common mode pressure 60 psi at 25 c [77 f] maximum flow 350 slpm 1. absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. however, the ele ctrical and mechanical characteristics are not guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily operate at absolute maximum ratings. 2. digital i/o pins are diode protected at this voltage up to 2 ma. digital bus voltage may exceed this value if the maximum dig ital bus current is limited to 2 ma or less. the maximum bus current is generally determined by the bus pull - up resistors. table 2: operating characteristics characteristic parameter note supply voltage 3 v dc to 10 v dc ? supply current 20 ma max. ? power 3 vdc: 60 mw max., 10 vdc: 200 mw max. ? calibrated temp erature range 0 c to 50 c [32 f to 122 f] 3 operating temperature range - 20 c to 70 c [ - 4 f to 158 f] ? full scale (fs) flow 20 slpm or 200 slpm 4 calibrated flow range 0 to 20 slpm or 0 to 200 s lpm ? calibration gas clean, dry air 5 accuracy absolute greater of 3. 5 % of reading or 0. 5 %fs ( see figure 4. ) 6 total error band (teb) absolute greater of 4 . 0 % of reading or 0. 5 %fs ( see figure 4. ) 7 null accuracy 0. 5 %fs 8 flow r esponse time 1 ms 9 warm up time 35 ms 10 reso lution : 20 sl pm 200 s lpm 0.0 03 slpm (min.) 0.0 2 slpm (min.) ? bus standards i 2 c fast mode (up to 400 khz) 11 proof pressure 150 psig ? burst pressure 200 psig ? reverse polarity protection no ? notes: 3. custom and extended temperature compensated range s are possible. contact honeywell for details. 4. honeywell standard for m ass f low rate units is slpm, which ha s reference conditions of 0 c and 1 atm . custom units are given as lpm with listed reference conditions at the first mention. 5. contact honeywel l for requirements with other custom gases for calibration . see the technical note gas media compatibility and correction factors . 6. accuracy is the maximum deviation in output from nomina l over the entire calibrated flow range at 25 oc . errors include o ffset, full scale span , linearity, flow hysteresis, and repeatability (see figure s 3 and 4 ) . 7. total error band (teb) is the maximum deviation in output from nominal over the entire calibrated flow range and temperature range. total e rror b and includes all accuracy errors, as well as all tempera ture effects over the compensated temperature range , including t emperature o ffset, temperature sp an and thermal hysteresis . 8. null accuracy is the maximum deviation in output from nominal at null flow over the entire calibrated temperature range. 9. response time: time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of t he transducer may be affected by the pneumatic interface). 10. warm - up time: time to the first valid flow measurement after power is applied. 11. refer to the technical note i 2 c communications with honeywell digital airflow sensors for i 2 c protocol information .
20 sl p m or 200 sl p m honeywell sensing and control 3 table 3. compatible gases table 4. environmental characteristics gas calibration type characteristic parameter dry air standard calibration humidity 0% to 95% rh, non - condensing helium (he) optimized calibration avai lable shock 30 g, 6 ms argon (ar) vibration 1.33 g at 10 hz to 500 hz nitrogen (n 2 ) esd iec6100 - 4 - 2 air discharge up to 8 kv, or direct contact discharge up to 4 kv nitrous oxide (n 2 o) carbon dioxide (co 2 ) radiated immunity level 3 from (8 0 mhz to 1000 mhz) per spec iec61000 - 4 - 3 oxygen (o 2 ) see the technical note gas media compatibility and correction factors . 80/20 he/o 2 mix methane (ch4) xenon (xe) table 5. materials characteristic parameter wetted materials glass reinforced (gr) thermoplastic polymer, gold, silicon, silicon dioxide, silicon nitride, epoxy, pcb epoxy composite housing gr thermoplastic polymer substrate pcb adhesives epoxy electr onic components silicon, gold complian ce rohs, weee table 6 . recommended mounting and implementation characteristic parameter caution large particulate damage use a 5 - micron filter upstream of the sensor to keep media flow through the sensor free of c ondensing moisture and particulates. large, high - velocity particles or conductive particles may damage the sensing element. failure to comply with these instructions may result in product damage. mounting screw size 10 - 32 mounting screw torque 1 , 13 n m [ 20 10 in - lb] electrical connection 6 pin sip connector pneumatic connection manifold mount, 22 mm od tapered male fitting , g 3/8 female threaded fitting filter recommendation 5 - micron filter upstream of the sensor figure 1 . nomenclature and order guide note: apart from the general configuration required, other customer - specific requirements are also possible. please contact honeywell.
honeywell zephyr? digital airflow sensors haf series ? 4 sensing.honeywell.com figure 2 . nominal digital output 20 s lpm full sc ale 200 s lpm full sc ale figure 3. total error ba nd explanation, 20 slpm and 200 slpm figure 4. accuracy and total error band, 20 slpm and 200 slpm table 7. ideal transfer function digital output code = 1638 4 * [0. 1 + 0. 8 * (flow applie d/full scale flow)] flow applied = full scale flow * [(digital output code/1638 4 ) - 0. 1 ]/0. 8 f l o w h y s t e r e s i s + + + r e p e a t a b i l i t y t e m p e r a t u r e o f f s e t t o t a l e r r o r b a n d a c c u r a c y a l l p o s s i b l e e r r o r s = = f u l l s c a l e s p a n o f f s e t + + l i n e a r i t y t e m p e r a t u r e s p a n t h e r m a l h y s t e r e s i s + + e r r o r ( % f s ) 0 % % f s 1 0 1 0 0 i d e a l a c c u r a c y 0 % f s t o 1 4 . 3 % f s = 0 . 5 % 1 4 . 3 % f s t o 1 0 0 % f s = 3 . 5 % 2 0 5 0 9 0 7 0 0 4 . 0 0 % 3 . 0 0 % 2 . 0 0 % 1 . 0 0 % - 1 . 0 0 % - 2 . 0 0 % - 3 . 0 0 % - 4 . 0 0 % 3 0 4 0 6 0 8 0 t o t a l e r r o r b a n d 0 % f s t o 1 2 . 5 % f s = 0 . 5 % 1 2 . 5 % f s t o 1 0 0 % f s = 4 %
20 sl p m or 200 sl p m honeywell sensing and control 5 figure 5 . flow vs pressure drop : 20 slpm flow typ. pressure drop slpm psi inh 2 0 mbar 0 0 0 0 1 0.001 0.030 0.075 2 0.002 0.062 0.153 4 0.004 0.1 24 0.309 6 0.007 0.190 0.473 8 0.009 0.262 0.653 10 0.012 0.337 0.839 12 0.015 0.421 1.048 14 0.018 0.510 1.270 16 0.022 0.604 1.504 18 0.026 0.709 1.765 20 0.030 0.818 2.035 figure 6 . flow vs pressure drop : 20 0 slpm flow typ. pressure drop slpm psi inh 2 0 mbar 0 0.000 0 0 7 0.009 0.260 0.646 12 0.020 0.564 1.403 17 0.030 0.824 2.052 20 0.033 0.915 2.278 25 0.044 1.211 3.013 50 0.116 3.225 8.026 75 0.218 6.037 15.028 100 0.342 9.464 23.556 125 0.491 13.606 33 . 866 1 50 0.658 18.234 45.386 175 0.849 23.505 58 . 507 200 1.040 28.801 71.688 digital interface for additional details on the use of zephyr with digital output see the technical note i 2 c c ommunications with honeywell digital airflow sensors . the sensor uses the i 2 c standard for digital communication with a slave address specified in the nomenclature and order guide in figure 1. following sensor power - up, each of the first two read sequen ces shown in figure 7 will respond with 2 bytes of the unique 4 - byte serial number. the first read after power - up will respond with the two most significant bytes of the serial number, while the second read will respond with the two least significant bytes of the serial number. for reliable performance, allow sensor to be powered for the sensor startup time before performing the first read, then allow a 10 ms command response time before performing the second read.
honeywell zephyr? digital airflow sensors haf series ? 6 sensing.honeywell.com figure 7 . sensor i 2 c read and write s e quences after the power - up read sequence described above, the sensor will respond to each i 2 c read request with a 16 - bit (2 byte) digital flow reading. read requests taken faster than the response time (1 ms) are not guaranteed to return fresh data. th e first two bits of each flow reading will be 00, while non - flow responses (such as error and status codes) will begin with 11. there are several user commands available as shown in table 8 . following an i 2 c write sequence of a user command, the senso r will respond to the next i 2 c read request with a 16 - bit response. possible responses to user commands can be seen in table 9. table 8 . user command descriptions command byte (hexadecimal) command name command description command response time (max.) 0x 01 getserialnumber next two read requests will each return two bytes of the sensor's unique 4 - byte serial number. 10 ms 0x02 poweronreset force power - on reset of sensor microcontroller. 20 ms 0x03 checksum calculates eeprom checksum and compares to produ ction checksum value. if the values match, the next read request will respond with 0xcca5. otherwise, the next read will respond with 0xcc90. 1 s table 9 . sensor response descriptions sensor response (hexadecimal) response name response description 0xcc a5 posack n on - response command was executed successfully 0xcc99 badcommand c ommand byte was not recognized 0xcc9a badparam c ommand sent with incorrect parameter bytes 0xcc9b failure c ommand failed during execution 0xcc90 badchecksum c hecksum did not ma tch stored value 0xccbb busy s ensor is busy calculating the checksum value
20 sl p m or 200 sl p m honeywell sensing and control 7 the maximum sink current on scl or sda is 2 ma. therefore, if the pull - up resistors are biased by v dd , and if v dd reaches the maximum supply voltage of 6 v, then the pull - up resis tors for scl and sda must be greater than 3.0 k? to limit the sink current to 2 ma. the typical value for scl and sda pull - up resistors is 4.7 k? (this value depends on the bus capacitance and the bus speed). figure 8 . mounting dimensions (for reference o nly: mm [in]). port style: manifold mount mounting footprint a = pin 1 b = 4x 10 - 32 pan head screws 1,13 n m [20 10 in - lb] torque. c = 2x gland for o - ring as - 568 - 113, 13.94 mm id x 2.62 mm w [0. 549 in id x 0.103 in w . two o - rings, as568a - 113 duro meter a65 to a80 silicon or viton, are required to seal sensor to manifold. o - rings are not included . d = flow channel
honeywell zephyr? digital airflow sensors haf series ? 8 sensing.honeywell.com figure 8 . mounting dimensions (for reference only: mm [in] , continued.) port style: 22 mm od tapered male fitting per iso 5356 mounti ng footprint a = pin 1 b = 2 x 10 - 32 pan head screws 1,13 n m [20 10 in - lb] torque. c = 15 mm id/22 mm od tapered fitting per iso 5356 . port style: g 3/8 female threaded fitting per iso 1179 mounting footprint a = pin 1 b = 2 x 10 - 32 pan head screws 1,13 n m [20 10 in - lb] torque. c = iso 1179 g3/8, recommended torque is 1.7 0.6 n m [15 5 in lb] . electrical connector part number is jst (japan solderless terminals) b6b - ph - k - s. mating connector part numbers are jst phr - 6 (socket) a nd jst sph - 002t - p0.5l (crimp terminal). table 10 . pinout (digital function) pin 1 pin 2 pin 3 pin 4 pin 5 pin 6 nc scl vdd ground sda nc
sensing and control honeywell 1985 douglas drive north golden valley, mn 55422 sensing.honeywell.com 00 8267 - 3 - en february 201 3 ? 201 3 honeywell international inc. all rights reserved.l warning personal injury do not use these products as safety or emergency stop devices or in any other applicat ion where failure of the product could result in personal injury. failure to comply with these instructions could result in death or serious injury. warranty/remedy honeywell warrants goods of its manufacture as being free of defective materials and faul ty workmanship. honeywells standard product warranty applies unless agreed to otherwise by honeywell in writing; please refer to your order acknowledgement or consult your local sales office for specific warranty details. if warranted goods are returned t o honeywell during the period of coverage, honeywell will repair or replace, at its option, without charge those items it finds defective. the foregoing is buyers sole remedy and is in lieu of all other warranties, expressed or implied, including those of merchantability and fitness for a particular purpose. in no event shall honeywell be liable for consequential, special, or indirect damages. while we provide application assistance personally, through our literature and the honeywell web site, it is up t o the customer to determine the suitability of the product in the application. specifications may change without notice. the information we supply is believed to be accurate and reliable as of this printing. however, we assume no responsibility for its us e. warning misuse of documentat ion ? the information presented in this product sheet is for reference only. do not use this document as a product installation guide. ? complete installation, operation, and maintenance information is provided in the instructions supplied with each product. failure to comply with these instructions could result in death or serious injury. sales and service honeywell serves its customers through a worldwide network of sales offices, representatives and distrib utors. for application assistance, current specifications, pricing or name of the nearest authorized distributor, contact your local sales office or: e - mail : info.sc@honeywell.com internet: sensing.honeywell.com phone and fax: asia pacific +65 6355 - 2828 +65 6445 - 3033 fax europe +44 (0) 1698 481 481 +44 (0) 1698 481676 fax latin america +1 - 305 - 805 - 8188 +1 - 305 - 883 - 8257 fax usa/canada +1 - 800 - 537 - 6945 +1 - 815 - 235 - 6847 +1 - 815 - 235 - 6545 fax
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